Title :
Processing and characterization of samarium and manganese modified lead titanate thin film
Author :
Fan, Chen-Lung ; Huebner, Wayne
Author_Institution :
Missouri Univ., Rolla, MO, USA
Abstract :
Samarium and manganese modified lead titanate thin films were fabricated by spin-coating an amorphous citrate precursor. These films transformed into an oxide film upon heat treatment at 400°C or above. Relatively large area and crack-free thin films could be obtained by this process both easily and inexpensively. The rheological behavior of the precursor solution, as well as its thermal decomposition and phase development were studied by means of DSC/TGA and XRD. The thickness and grain size of the oxide film were examined by TEM and SEM
Keywords :
X-ray diffraction; coating techniques; ferroelectric materials; ferroelectric thin films; grain size; heat treatment; lead compounds; manganese; piezoelectric materials; piezoelectric thin films; pyrolysis; rheology; samarium; scanning electron microscopy; thermal analysis; transmission electron microscopy; 400 degC; DSC; PbTiO3:Mn; PbTiO3:Sm; PbTiO3:Sm(Mn); SEM; TEM; TGA; XRD; amorphous citrate precursor; characterization; film thickness; grain size; heat treatment; oxide film; phase development; precursor solution; processing; rheological behavior; spin-coating; thermal decomposition; thin films; Amorphous materials; Grain size; Heat treatment; Manganese; Rheology; Samarium; Thermal decomposition; Titanium compounds; Transistors; X-ray scattering;
Conference_Titel :
Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
Conference_Location :
University Park, PA
Print_ISBN :
0-7803-1847-1
DOI :
10.1109/ISAF.1994.522417
