Study on the acoustic system of the ultrasonic micro milling machine

In order to machine the small shape of hard and brittle materials, Ultrasonic micro-milling was considered an effective method, especially for the materials´ precision machining and ultra-precision machining. Aiming the requirement of micro-machine that it should have small size and high precision, the acoustic system was designed. Modal analysis was used for the designed acoustic system with the soft of finite element analysis. A batch of acoustic systems were made for the experimental testing. The testing result reported that the parameters of the acoustic system for the ultrasonic micro-milling achieve the requirement.