DocumentCode :
3161413
Title :
Patterning Copper using Ink Jet Printing of Self Assembled Monolayers
Author :
Ebbens, Stephen J. ; Hutt, David A. ; Liu, Changqing
Author_Institution :
Loughborough Univ., Loughborough
fYear :
2007
fDate :
10-12 Dec. 2007
Firstpage :
114
Lastpage :
119
Abstract :
The ability to produce conductive copper tracks using ink-jet printing to allow the routine digital manufacture of patterned electrical interconnects is a long standing industry aim. In this study an approach to achieve this goal is investigated that uses an ink-jet printed self-assembled monolayer (SAM) coating as a molecular etch resist. To date, ink-jet printed SAMs on copper have not had sufficient quality to allow them to act in this way. However, recently an improved etching solution that enables similar quality microcontact printed SAM layers to act as resists on copper has been reported. Here this new etch solution is used to attempt to "develop" ink-jet printed SAM patterns on thin copper laminates into conductive tracks. The success of this approach and quality of resulting tracks is tested using optical microscopy, scanning electron microscopy and atomic force microscopy. This allows an assessment of the performance of this novel approach to interconnection manufacture to be made.
Keywords :
atomic force microscopy; copper; etching; interconnections; monolayers; optical microscopy; resists; scanning electron microscopy; self-assembly; soft lithography; Cu; atomic force microscopy; conductive copper tracks; digital manufacture; ink jet printing; interconnection manufacture; microcontact printed layers; molecular etch resist; optical microscopy; patterned electrical interconnects; scanning electron microscopy; self assembled monolayers; thin copper laminates; Atom optics; Atomic force microscopy; Copper; Etching; Ink jet printing; Manufacturing industries; Metals industry; Optical microscopy; Resists; Scanning electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Packaging Technology Conference, 2007. EPTC 2007. 9th
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-1323-2
Electronic_ISBN :
978-1-4244-1323-2
Type :
conf
DOI :
10.1109/EPTC.2007.4469760
Filename :
4469760
Link To Document :
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