DocumentCode :
3161653
Title :
Experiences In Extraction Of Contact Parameters From Process Evaluation Test-structures
Author :
Lieneweg, Udo
Author_Institution :
California Institute Of Technology
fYear :
1988
fDate :
22-23 Feb 1988
Firstpage :
15
Lastpage :
16
Keywords :
Conductivity; Contact resistance; Electrical resistance measurement; Flanges; Gallium arsenide; Laboratories; Propulsion; Radio frequency; Strips; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Type :
conf
DOI :
10.1109/ICMTS.1988.672921
Filename :
672921
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3161653
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