Title :
An Objective Method Of Assessing Metal Patterning Quality
Author :
Stevenson, J.T.M. ; Gow, J. ; Serack, J.
Author_Institution :
University Of Edinburgh
Keywords :
Automatic testing; Bars; Electrical fault detection; Etching; Geometry; Lithography; Plasma chemistry; Resists; Surface waves; Very large scale integration;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672924
