DocumentCode
3162575
Title
A Microelectronic Test Structure For Thickness Determination Of Homogeneous Conducting Thin Films In VLSI Processing
Author
Kim, J.S. ; Linholm, L.W. ; Barley, B.L. ; Hanes, M.H. ; Cresswell, M.W.
Author_Institution
National Bureau Of Standards
fYear
1988
fDate
22-23 Feb. 1988
Firstpage
34
Lastpage
38
Keywords
Bridge circuits; Conductive films; Conductivity; Electrical resistance measurement; Microelectronics; Resistors; Testing; Thickness measurement; Transistors; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location
Long Beach, CA, USA
Type
conf
DOI
10.1109/ICMTS.1988.672925
Filename
672925
Link To Document