A dual-SPDT RF-MEMS switch on a small-sized LTCC phase shifter for Ku-band operation

Integration of low temperature co-fired ceramics (LTCC) technology and RF-MEMS is applicable for the realization of a small and cost-effective phase shifter. In this paper, a line-switched-type phase shifter with 3D waveguide structures and a novel design of RF-MEMS switch was demonstrated. The design method and fabrication process were reported with experimental results. The insertion loss and phase error of the 4-bit digital phase shifter on LTCC substrates with the size of 8 mm × 8 mm × 0.55 mm was measured to be around 0.5 dB/bit and less than 5% at 12.5 GHz, respectively. The Dual Single-Pole-Double-Throw (D-SPDT) MEMS switch showed driving voltage of 40 V, insertion loss of 0.9 dB, return loss of 12 dB and isolation of -29 dB at 12.5 GHz.