Title :
Broadband Microprobe Characterization of the Ferroelectric Films and Varactors
Author :
Vorobiev, A. ; Kuylenstierna, D. ; Rundqvist, P. ; Gevorgian, S.
Author_Institution :
Dept. of Microtechnology & Nanoscience, Chalmers Univ. of Technol., Gothenburg
Abstract :
A simple method for the assessment of layout parasitics in the on-wafer microprobe characterization of the ferroelectric films and varactors is presented. The proposed method considers also the effect of the negative inductance associated with calibration procedure
Keywords :
equivalent circuits; ferroelectric capacitors; ferroelectric thin films; microwave devices; varactors; broadband microprobe characterization; calibration procedure; ferroelectric films; layout parasitics assessment; negative inductance effect; on-wafer microprobe characterization; varactors; Calibration; Circuit testing; Ferroelectric films; Ferroelectric materials; Frequency; Inductance; Microwave circuits; Microwave devices; Parasitic capacitance; Varactors; Varactors; ferroelectric; microwave devices; thin films;
Conference_Titel :
Microwave Conference, 2006. 36th European
Conference_Location :
Manchester
Print_ISBN :
2-9600551-6-0
DOI :
10.1109/EUMC.2006.281051
