Title :
Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.02EX589)
Abstract :
Presents the front cover, front matter, and table of contents from the conference proceedings.
Keywords :
lithography; micromechanical devices; nanotechnology; Bio MEMS; EUV lithography; X-ray lithography; electron beam lithography; etching; inspection; ion beam lithography; lab-on-a-chip; metrology; microprocesses; microsystem technology; nano imprint lithography; nanodevices; nanofabrication techniques; nanotechnology; next generation lithography; optical lithography; repair; resists; thin film deposition;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-031-3
DOI :
10.1109/IMNC.2002.1178513
