Title :
Nanoimprint lithography: opportunities and applications
Author_Institution :
Div. of Solid State Phys., Lund Univ., Sweden
Abstract :
In the first part of this presentation I will highlight the understanding about nanoimprint lithography (NIL) we have developed within the two EU projects that I have been privileged to coordinate, NANOTECH and CHANIL. In the second part I will concentrate on various applications that has been successfully implemented using NIL and the concerns related to NIL for applications. This will include fabrication of electronic devices such as three terminal ballistic devices, position sensitive radiation detectors, biosensors, high frequency nanoelectromechanical systems, development of materials and patterns to increase bio-compatability and lab-on-a-chip implementations allowing, for example, in-vitro studies of controlled motion of motor proteins. Then, finally in I will give conclude my talk and give some outlooks and prospects for the implementation of NIL in various application areas.
Keywords :
lithography; nanotechnology; nanoimprint lithography; Biological materials; Biosensors; Fabrication; Frequency; In vitro; Lab-on-a-chip; Motion control; Nanoelectromechanical systems; Nanolithography; Radiation detectors;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-031-3
DOI :
10.1109/IMNC.2002.1178522