DocumentCode
316442
Title
Vacuum Microelectronics-the next ten years
Author
Brodie, I.
Author_Institution
SRI International, USA
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
1
Lastpage
6
Keywords
Electron emission; Electron sources; Integrated circuit technology; Laboratories; Microelectronics; Physics; Silicon; Solid state circuits; Vacuum breakdown; Vacuum technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627377
Filename
627377
Link To Document