DocumentCode :
316442
Title :
Vacuum Microelectronics-the next ten years
Author :
Brodie, I.
Author_Institution :
SRI International, USA
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
1
Lastpage :
6
Keywords :
Electron emission; Electron sources; Integrated circuit technology; Laboratories; Microelectronics; Physics; Silicon; Solid state circuits; Vacuum breakdown; Vacuum technology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627377
Filename :
627377
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=316442