DocumentCode

316451

Title

Self-aligned Si gate FEAs using Transfer Mold Technique

Author

Sakai, Tadashi ; Ono, Tomio ; Nakamoto, Masayuki ; Sakuma, Naoshi

Author_Institution

Advanced Semiconductor Devices Research Lab

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

48

Lastpage

52

Keywords

Apertures; Electrodes; Fabrication; Field emitter arrays; Glass; Magnetic materials; Reproducibility of results; Shape; Sputter etching; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627386

Filename

627386