Preparation of Ultrasharp Diamond Tip Emitters by Ion Beam Etching

Author

Stepanova, A.N. ; Givargizov, E.I. ; Bormatova, L.V. ; Zhirnov, V.V. ; Mashkova, E.S. ; Molchanov, A.V.

Author_Institution

Institute of Crystallography, Russian Academy of Sciences, Moscow

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

Lastpage

102

Keywords

Coatings; Crystallography; Etching; Ion beams; Low voltage; Microelectronics; Milling; Nuclear physics; Robustness; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

DOI

10.1109/IVMC.1997.627396

Filename

627396

Link To Document