DocumentCode
316472
Title
Enhancement of electron emission characteristics of platform-shaped Mo emitters by diamond-like carbon coatings
Author
Lin, C.M. ; Chuang, F.Y. ; Lai, J.T. ; Wang, C.H. ; Hsiu, T.Y. ; Yokoyama, Meiso ; Lin, I.N. ; Tsai, J.H. ; Huang, C.M. ; Wang, W.C.
Author_Institution
Electronic Research & Service Organization, ITRI, Hsinchu, Taiwan
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
151
Lastpage
155
Keywords
Carbon dioxide; Cathodes; Coatings; Diamond-like carbon; Electron emission; Optical pulses; Pulsed laser deposition; Temperature; Thickness control; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627407
Filename
627407
Link To Document