DocumentCode
316475
Title
Fabrication and Simulation of DLC Field Emitter Triode
Author
KO, Tae-Young ; Chung, Bokeon ; Joo-yong Lee ; Jeon, D. ; Lee, K.-R.
Author_Institution
Myong Ji University
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
166
Lastpage
170
Keywords
Cathodes; Conducting materials; Diamond-like carbon; Electron emission; Fabrication; Flat panel displays; Silicon; Sputter etching; Sputtering; Thermal conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627410
Filename
627410
Link To Document