DocumentCode
316484
Title
Atomic Investigation of Individual Apexes of Diamond Emitters by a Scanning Atom Probe
Author
Nishikawa, Osamu ; Sekine, Takahiro ; Ohtani, Yoshikatsu ; Maeda, Kiyoshi ; Iwatsuki, Masash ; Aoki, Susumu ; Itoh, Junji ; Yamanaka, Kazushi
Author_Institution
Dept. of Materials Sciences and Engineering, Kanazawa Institute of Technology
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
209
Lastpage
214
Keywords
Atom optics; Atomic layer deposition; Atomic measurements; Chemical analysis; Chemical vapor deposition; Electrodes; Field emitter arrays; Materials science and technology; Probes; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627496
Filename
627496
Link To Document