DocumentCode
316508
Title
A theoretical estimation of beam spot size in a single emitter
Author
Park, Jun Sang ; Han, Jeong In
Author_Institution
Department of Mechanical Engineering, Halla Institute of Technology
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
331
Lastpage
335
Keywords
Anodes; Boundary conditions; Conformal mapping; Current density; Electric potential; Electron beams; Electron emission; Estimation theory; Poles and towers; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627586
Filename
627586
Link To Document