DocumentCode
316518
Title
Emission Characteristics of TiN-Coated Silicon Field Emitter Arrays
Author
Kang, Seung-Youl ; Lee, Jin Ho ; Song, Yoon-Ho ; Kim, Youn Tae ; Cho, Kyoung Ik ; Hyung Joun Yoo
Author_Institution
Semiconductor Technology Div., Electronics and Telecommunications Research Institute
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
376
Lastpage
380
Keywords
Coatings; Dry etching; Electrodes; Field emitter arrays; Rapid thermal processing; Semiconductor devices; Silicon; Thermal conductivity; Tin; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627599
Filename
627599
Link To Document