Low cost and high performance micro-fabrication method using low NA projection lithography on copper clad plastic boards

A very low cost MEMS fabrication method is developed. Low NA projection lithography using near UV and visible lights is applied, and copper clad plastic boards are used as substrates. Using a low NA projection lens, very large depth of focus is obtained, and using copper clad plastic substrates permit us to omit the base metal deposition for electroplating. Moreover, electroplated micro components are easily separated from the substrates adding only tiny mechanical force without preparing some sacrifice layers.