Integration of High Voltage LDMOSFETs into a Low Voltage CMOS Technology for Display´s Driving Circuit Applications

Author

Ki, J.D. ; Park, M.Y. ; Kang, J.Y. ; Lee, S.Y. ; Koo, J.G. ; Cho, K.I. ; Nam, K.S.

Author_Institution

Semiconductor Division, Electronics and Telecommunications Research Institute

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

572

Lastpage

576

Keywords

CMOS process; CMOS technology; Costs; Low voltage; MOSFETs; Manufacturing processes; Plasma displays; Power integrated circuits; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

DOI

10.1109/IVMC.1997.627652

Filename

627652

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