Title :
Fabrication of multiple microcolumn array combined with field emission array (FEA)
Author :
Park, Jeong-Young ; Lera, Jared D. ; Yakshin, M.A. ; Choi, S.S. ; Lee, Y. ; Lee, J.D. ; Chun, K.J. ; Jeon, D. ; Kuk, Young
Author_Institution :
Department of Physics, Seoul National University, Seoul
Keywords :
Electron beams; Electron sources; Fabrication; Field emitter arrays; Lenses; Lithography; Micromachining; Microoptics; Physics; Scanning electron microscopy;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627656
