DocumentCode
316563
Title
Fabrication of multiple microcolumn array combined with field emission array (FEA)
Author
Park, Jeong-Young ; Lera, Jared D. ; Yakshin, M.A. ; Choi, S.S. ; Lee, Y. ; Lee, J.D. ; Chun, K.J. ; Jeon, D. ; Kuk, Young
Author_Institution
Department of Physics, Seoul National University, Seoul
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
587
Lastpage
592
Keywords
Electron beams; Electron sources; Fabrication; Field emitter arrays; Lenses; Lithography; Micromachining; Microoptics; Physics; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627656
Filename
627656
Link To Document