DocumentCode

316575

Title

Micro Electron Gun with Silicon Micro Field Emitter

Author

Endo, Yasuhiro ; Honjo, Ichiro ; Goto, Shunji

Author_Institution

Fujitsu Laboratories Ltd.

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

644

Lastpage

647

Keywords

Electron beams; Electron emission; Electron guns; Fluctuations; Hafnium; Insulation; Laboratories; Silicon; Stability; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627668

Filename

627668