DocumentCode :
316598
Title :
A New Simple Method To Monitor A Small Diamond Film On The Top Of A Tip From Si-fea#
Author :
Liu, Guangyi ; Ke, JinSong ; Zhu, Changchun ; Dong, Xiao ; Lin, Zangda ; Jiang, Yanan
Author_Institution :
Institute of Electronics, Academia Sinica
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
758
Lastpage :
762
Keywords :
Chemical vapor deposition; Electromagnetic heating; Microwave theory and techniques; Monitoring; Optical films; Plasma chemistry; Plasma properties; Plasma temperature; Silicon; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627692
Filename :
627692
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=316598
بازگشت