Title :
Fabrication and evaluation of amperometric sensors for micro flow cell using 3-D comb electrodes
Author :
Honda, N. ; Emi, K. ; Katagiri, Takahiro ; Kawakami, S. ; Irita, T. ; Shoji, S. ; Sato, H. ; Homma, T. ; Osaka, T.
Author_Institution :
Dept. of Electron., Inf. & Commimication Eng., Waseda Univ., Tokyo, Japan
Abstract :
An efficient electrochemical detector using 3-D comb electrodes was proposed and fabricated by simple micro fabrication technology. The dimensions of fabricated 3-D electrodes were 10 /spl mu/m in width, 30 /spl mu/m in height, and 10 /spl mu/m gap. A prototype of micro flow cell for electrochemical immunoassay using 3-D electrodes was designed and fabricated. The qualitative evaluation of the flow cell for enzyme immunoassay will be discussed.
Keywords :
biomedical measurement; biosensors; electrochemical sensors; microfluidics; proteins; 10 mm; 3-D comb electrodes; 30 mm; amperometric sensors; electrochemical detector; electrochemical immunoassay; enzyme immunoassay; micro fabrication technology; micro flow cell; Amperometric sensors; Biochemistry; Detectors; Electrodes; Fabrication; Glass; Gold; Nickel; Resists; Substrates;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-031-3
DOI :
10.1109/IMNC.2002.1178657
