Title :
Design and fabrication of SOI-based micromirror for laser raster scanning display
Author :
Wenjing, Liu ; Yongming, Tang ; Baoping, Wang
Author_Institution :
Sch. of Electron. Sci. & Eng., Southeast Univ., Nanjing
Abstract :
In this paper, the design and fabrication of Silicon-On-Insulator scanning micromirrors that have high angular precision over a large scan angle is described. These microscanners are actuated by electrostatic comb drives, which consume minimum amounts of power. When driven by AC signals, these scanners have fast scan rates and large scan angles.
Keywords :
microdisplays; micromirrors; optical design techniques; optical fabrication; optical scanners; silicon-on-insulator; AC signal; SOI-based micromirror; Si-SiO2; electrostatic comb drive; laser raster scanning display; silicon-on-insulator fabrication; Chromium; Displays; Electrodes; Electrostatics; Glass; Gold; Micromirrors; Optical design; Optical device fabrication; Resonant frequency;
Conference_Titel :
SOI Conference, 2008. SOI. IEEE International
Conference_Location :
New Paltz, NY
Print_ISBN :
978-1-4244-1954-8
Electronic_ISBN :
1078-621X
DOI :
10.1109/SOI.2008.4656308
