Design and fabrication of Y-branched vertical power splitters using polymers

Through waveguide simulation and preliminary measurements we have shown the practicality of fabricating Y-branched vertical power splitters with polymers. Additionally, we will present further power splitting and loss analysis of fabricated vertical Y-branches. The fabrication steps of photolithography and RIE accurately produce vertical bends with controllable separation angles. This fabrication method utilizes the unique polymer processing steps of spin casting and oxygen plasma etching. Vertically branched structures utilizing these waveguide bends possess variable power splitting ratios. In this way, Y-branched vertical power splitters represent key elements necessary for practical three dimensional integrated optics