Title :
Design and analysis of dual axis MEMS accelerometer
Author :
Chattaraj, D. ; Swamy, K.B.M. ; Sen, S.
Author_Institution :
Indian Inst. of Technol. Kharagpur, Kharagpur
Abstract :
A dual axis MEMS capacitive Accelerometer with a single proof mass structure has been designed for the range of plusmn30 g. Instead of using two single axis accelerometer separately; an unique structure combining the features of two single axis accelerometer has been designed for measuring the acceleration in ´x´ and ´y´ axes simultaneously.
Keywords :
accelerometers; micromechanical devices; dual axis MEMS capacitive accelerometer; micromechanical devices; single proof mass structure; Acceleration; Accelerometers; Capacitance; Capacitive sensors; Capacitors; Costs; Fingers; Micromechanical devices; Springs; Visualization; ACCELEROMETER; CAPACITIVE; DUAL AXIS; MEMS;
Conference_Titel :
Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
Conference_Location :
Mumbai
Print_ISBN :
978-1-4244-1728-5
Electronic_ISBN :
978-1-4244-1728-5
DOI :
10.1109/IWPSD.2007.4472621
