Title :
A new robust on-wafer 1/f noise measurement and characterization system
Author :
Blaum, Alfred ; Pilloud, Olivier ; Scalea, Giacomo ; Victory, James ; Sischka, Franz
Author_Institution :
Motorola Inc., Geneva, Switzerland
Abstract :
Performing accurate, robust and repeatable 1/f measurement is critical to meaningful modeling and simulation of 1/f noise. Accurate measurement and modeling of 1/f noise of such devices as deep submicron CMOS, HBTs, and RF passive components is critical to design of RF circuits. In this paper, a new on-wafer flicker noise characterization system including test structure methodology is presented. The system, well suited for technology characterization, has been developed at Motorola in collaboration with Agilent Technologies
Keywords :
1/f noise; CMOS integrated circuits; MOSFET; circuit simulation; electric noise measurement; flicker noise; heterojunction bipolar transistors; resistors; semiconductor device measurement; semiconductor device models; test equipment; 1/f noise; CMOS; HBTs; RF circuit design; RF passive components; measurement accuracy; modeling; on-wafer 1/f noise measurement/characterization system; on-wafer flicker noise characterization system; repeatable 1/f measurement; robust 1/f measurement; simulation; technology characterization; test structure methodology; 1f noise; CMOS technology; Circuit noise; Circuit simulation; Circuit testing; Noise measurement; Noise robustness; Performance evaluation; Radio frequency; Semiconductor device modeling;
Conference_Titel :
Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on
Conference_Location :
Kobe
Print_ISBN :
0-7803-6511-9
DOI :
10.1109/ICMTS.2001.928650
