Design and Control of a Nano-precision Cartesian Platform

Author

Ting, Yung ; Li, Chun-Chung ; Jar, Ho-Chin ; Chiang, Chang-Wei

Author_Institution

Dept. of Mech. Eng., Chung Yuan Christian Univ., Chung-li

fYear

2006

fDate

Oct. 2006

Firstpage

1898

Lastpage

1903

Abstract

In this article, a Cartesian coordinate nano-scale positioning platform driven by stack-type piezoelectric actuator associated with flexure hinge mechanism is developed. Structural design and analysis, system identification, and feedforward controller design to deal with the hysteresis effect, as well as and the feedback PID controller designed by use of Ziegler-Nichols method and the genetic algorithm are included. The developed Cartesian platform is able to achieve the target within 10 nm in positioning at the stroke of 19 mum

Keywords

control system synthesis; feedback; feedforward; genetic algorithms; nanopositioning; piezoelectric actuators; three-term control; Cartesian coordinate nano-scale positioning platform; Ziegler-Nichols method; feedback PID controller; feedforward controller design; flexure hinge mechanism; genetic algorithm; hysteresis effect; nano-precision Cartesian platform; stack-type piezoelectric actuator; structural design; system identification; Algorithm design and analysis; Control systems; Fasteners; Genetic algorithms; Hysteresis; Intelligent robots; Open loop systems; Piezoelectric actuators; System identification; Three-term control; Ziegler-Nichols method; flexure hinge mechanism; genetic algorithm; hysteresis effect; nano-scale positioning platform;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Robots and Systems, 2006 IEEE/RSJ International Conference on

Conference_Location

Beijing

Print_ISBN

1-4244-0259-X

Electronic_ISBN

1-4244-0259-X

Type

conf

DOI

10.1109/IROS.2006.282315

Filename

4058657