Title :
Design and Control of a Nano-precision Cartesian Platform
Author :
Ting, Yung ; Li, Chun-Chung ; Jar, Ho-Chin ; Chiang, Chang-Wei
Author_Institution :
Dept. of Mech. Eng., Chung Yuan Christian Univ., Chung-li
Abstract :
In this article, a Cartesian coordinate nano-scale positioning platform driven by stack-type piezoelectric actuator associated with flexure hinge mechanism is developed. Structural design and analysis, system identification, and feedforward controller design to deal with the hysteresis effect, as well as and the feedback PID controller designed by use of Ziegler-Nichols method and the genetic algorithm are included. The developed Cartesian platform is able to achieve the target within 10 nm in positioning at the stroke of 19 mum
Keywords :
control system synthesis; feedback; feedforward; genetic algorithms; nanopositioning; piezoelectric actuators; three-term control; Cartesian coordinate nano-scale positioning platform; Ziegler-Nichols method; feedback PID controller; feedforward controller design; flexure hinge mechanism; genetic algorithm; hysteresis effect; nano-precision Cartesian platform; stack-type piezoelectric actuator; structural design; system identification; Algorithm design and analysis; Control systems; Fasteners; Genetic algorithms; Hysteresis; Intelligent robots; Open loop systems; Piezoelectric actuators; System identification; Three-term control; Ziegler-Nichols method; flexure hinge mechanism; genetic algorithm; hysteresis effect; nano-scale positioning platform;
Conference_Titel :
Intelligent Robots and Systems, 2006 IEEE/RSJ International Conference on
Conference_Location :
Beijing
Print_ISBN :
1-4244-0259-X
Electronic_ISBN :
1-4244-0259-X
DOI :
10.1109/IROS.2006.282315
