Title :
An infinite aperture optical system based on laser optical feedback application to submicrometric profilometry
Author :
Carminati, F.-R. ; Lacot, E. ; Hugon, O. ; Stoeckel, F.
Author_Institution :
Lab. de Spectrometrie Phys., St. Martin d´´Heres, France
Abstract :
We propose a new method for reconstitution of submicrometric profile based on the LOFI (Laser Optical Feedback Imaging) technique [E. Lacot, et al., 2002]. We show that this method is equivalent to an optical system with infinite aperture.
Keywords :
laser feedback; micrometry; optical images; infinite aperture optical system; laser optical feedback imaging; submicrometric profilometry; Apertures; Frequency; Laser applications; Laser feedback; Optical feedback; Optical imaging; Optical surface waves; Phase measurement; Surface emitting lasers; Surface waves;
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
DOI :
10.1109/CLEOE.2003.1313529
