Piezoelectric Vibration-Type Tactile Sensor with Wide Measurement Range Using Elasticity and Viscosity Change

We propose a new tactile sensor utilizing piezoelectric vibration. This tactile sensor has a high sensitivity, wide measurement range, pressure resistance, flexibility, and self-sensing function. This tactile sensor comprises two piezoelectric materials. One is used for the vibration of the sensor element and the other is used for the measurement of the change in mechanical impedance induced by an external force. We achieved the wide measurement range by implementing two ideas. One was to apply the external force to the sensor element through an elastic body and the other was to use two or more modes of vibration. Moreover, for the elastic body, it is preferable to use a material whose elasticity and viscosity are easily changed by an external force, such as a gel. In this study, first, this tactile sensor was analyzed, and then its characteristics were derived. The analytical results qualitatively corresponded to the experimental results. Next, a prototype tactile sensor was fabricated and evaluated. The evaluation results showed that this tactile sensor can measure a pressure of 2.5 Pa or less and a pressure of 10 kPa or more and its pressure resistance is 1 MPa or more