Title :
A study of electron distribution characteristics in ionization process of electron cyclotron resonance discharge
Author :
Jin, Xiaolin ; Yang, Zhonghai ; Huang, Tao
Author_Institution :
Univ. of Electron. Sci. & Technol. of China, Chengdu
Abstract :
In this work, the characters of electron distribution functions in ionization process of the argon ECR microwave discharge have been studied with the method of quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision. The results of the particle simulation for the ECR discharge which include the features of electron energy distributions have been presented.
Keywords :
Monte Carlo methods; cyclotron resonance; high-frequency discharges; ionisation; ECR microwave discharge; Monte Carlo collision; electron cyclotron resonance discharge; electron distribution characteristics; ionization process; quasithree-dimensional electromagnetic particle-in-cell; Cyclotrons; Distribution functions; Electromagnetic heating; Electrons; Fault location; Industrial electronics; Ionization; Plasma accelerators; Plasma simulation; Resonance;
Conference_Titel :
Vacuum Electronics Conference, 2007. IVEC '07. IEEE International
Conference_Location :
Kitakyushu
Print_ISBN :
1-4244-0633-1
DOI :
10.1109/IVELEC.2007.4283353
