Title :
Research of Influence of Materials Properties on Resonance Frequencies of Micromechanical Tuning Fork Gyroscope
Author :
Lobur, Mykhaylo ; Holovatyy, Andriy
Author_Institution :
Lviv Polytech. Nat. Univ, Lviv
Abstract :
In this paper the influence of materials properties on resonance frequencies is researched. It is shown how resonance drive and sense frequencies depend on material property.
Keywords :
gyroscopes; materials properties; microsensors; vibrations; MEMS; inertial sensors; materials properties; micromechanical tuning fork gyroscope; resonance frequencies; Force sensors; Gyroscopes; Iron; Material properties; Microelectromechanical systems; Micromechanical devices; Resonance; Resonant frequency; Structural beams; Vibrations; Coriolis force; MEMS (MicroElectroMechanical Systems) technologies; angular rate; inertial sensors; tuning fork comb-drive gyroscope;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-553-614-7
DOI :
10.1109/MEMSTECH.2007.4283440
