Title :
The formalization of the MEMS automated design process by usage of Petri Networks
Author :
Teslyuk, Vasyl ; Al-Shavabkeh, Hamza ; Pereyma, Mykola ; Tarik, Al Omari
Abstract :
The theory of Petri networks for formalization of hierarchic automated design of MEMS and their main characteristics is proposed.
Keywords :
Petri nets; electronic design automation; micromechanical devices; MEMS automated design process; Petri networks; hierarchic automated design; microelectromechanical system; Design automation; Equations; Fabrication; Finishing; Mathematical model; Micromechanical devices; Process design; Product design; Production; Software tools; Automated design; Petri networks; design level;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-553-614-7
DOI :
10.1109/MEMSTECH.2007.4283446
