Fringe pattern shift detection with nano resolution

Author

Pham, D.T. ; Wang, Z.

Author_Institution

Sch. of Eng., Cardiff Univ., UK

Volume

2

fYear

2002

fDate

26-30 Aug. 2002

Firstpage

1823

Abstract

The paper presents a hybrid interference fringe analysis system with which fringe pattern shifts can be determined with nano resolution. The system consists of a laser interferometer for linear calibration and a CCD camera-based fringe analysis module. The nano resolution of fringe pattern shift measurement was achieved using fringe pattern matching and linear interpolation techniques. A statistical analysis shows that linear interpolation lessens the effect of noise on the determination of fringe pattern shifts at the zero-crossing points of the mismatch function.

Keywords

calibration; image matching; image resolution; interpolation; light interferometers; light interferometry; optical noise; statistical analysis; CCD camera; fringe analysis module; fringe pattern shift detection; interference fringe analysis system; laser interferometer; linear calibration; linear interpolation; mismatch function; nano resolution; pattern matching; statistical analysis; Calibration; Charge coupled devices; Interpolation; Laser noise; Laser theory; Mirrors; Optical interferometry; Pattern analysis; Pattern matching; Statistical analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Signal Processing, 2002 6th International Conference on

Print_ISBN

0-7803-7488-6

Type

conf

DOI

10.1109/ICOSP.2002.1180158

Filename

1180158