DocumentCode
318376
Title
Mass-transport Fabrication Of Efficient Microlenses, Mirrors, Gratings And Monolithic Integrated Diode Lasers
Author
Liau, Z.L.
Author_Institution
Massachusetts Institute of Technology
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
49
Lastpage
50
Keywords
Fabrication; Gratings; Indium phosphide; Lenses; Microoptics; Mirrors; Optical refraction; Optical surface waves; Semiconductor laser arrays; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.639014
Filename
639014
Link To Document