Title :
Nanodots array rapidly fabricated by Dip-Pen Nanolithography with temperature and humidity control
Author :
Yin-Lin Lu ; Shih-Chung Wei ; Tzu-Heng Wu ; Hui-Hsin Lu ; Chii-Wann Lin
Author_Institution :
Inst. of Biomed. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
This study demonstrates the advantage of Dip-Pen Nanolithography (DPN) as a research and design tool for metal nano-structure fabrications. We design two different gold nano-structures, which are fabricated by DPN etching method with temperature and humidity control. The plasmon resonance frequencies of both structures are measured with dark field scattering spectroscopy. Our results show that with temperature and humidity control, DPN is highly potential in developing photonic circuit, solar cell and biomedical devices due to the rapid fabrication and cost effectiveness.
Keywords :
etching; nanofabrication; nanolithography; nanomedicine; nanostructured materials; surface plasmon resonance; Au; DPN etching; biomedical devices; dark field scattering spectroscopy; dip-pen nanolithography; gold nanostructures; humidity control; metal nanostructure fabrication; nanodot array; photonic circuit; plasmon resonance frequency; solar cell; temperature control; Arrays; Etching; Gold; Plasmons; Probes; Scattering; Temperature control;
Conference_Titel :
Engineering in Medicine and Biology Society (EMBC), 2013 35th Annual International Conference of the IEEE
Conference_Location :
Osaka
DOI :
10.1109/EMBC.2013.6609544