Title :
Power handling capability of High-Q evanescent-mode RF MEMS resonators with flexible diaphragm
Author :
Liu, Xiaoguang ; Katehi, Linda P B ; Chappell, William J. ; Peroulis, Dimitrios
Author_Institution :
Birck Nanotechnol. Center, Purdue Univ., West Lafayette, IN, USA
Abstract :
In this paper, we present theoretical and experimental investigations into the power handling capability of high-Q evanescent-mode RF MEMS tunable resonators based on electrostatically-actuated thin diaphragm tuner. The ¿self-biasing¿ of the diaphragm tuner from RF signal has been found to cause non-linear effects such as resonant frequency drift, frequency response distortion and instability. A non-linear circuit model has been proposed to predict such non-linearities and provide design guidelines for high power applications. Large signal measurement on a high-Q evanescent-mode resonator with no DC biasing shows good agreement with theoretical predictions.
Keywords :
Q-factor; diaphragms; electrostatic actuators; equivalent circuits; frequency response; micromechanical resonators; RF signal; design guidelines; electrostatically-actuated thin diaphragm tuner; flexible diaphragm; frequency instability; frequency response distortion; high power applications; high-Q evanescent-mode RF MEMS resonators; large signal measurement; nonlinear circuit model; nonlinear effects; power handling capability; resonant frequency drift; self-biasing; Cavity resonators; Frequency response; Micromechanical devices; Microwave filters; Nonlinear distortion; Radiofrequency microelectromechanical systems; Resonant frequency; Resonator filters; Tunable circuits and devices; Tuners; MEMS; evanescent-mode cavity; non-linearity; quality factor; self-biasing; tunable resonator;
Conference_Titel :
Microwave Conference, 2009. APMC 2009. Asia Pacific
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-2801-4
Electronic_ISBN :
978-1-4244-2802-1
DOI :
10.1109/APMC.2009.5385409
