• DocumentCode
    318852
  • Title

    Automatic EB fault tracing system by successive circuit extraction from VLSI CAD layout data

  • Author

    Miura, Katsuyoshi ; Nakata, Kohei ; Nakamae, Koji ; Fujioka, Hiromu

  • Author_Institution
    Fac. of Eng., Osaka Univ., Japan
  • fYear
    1997
  • fDate
    17-19 Nov 1997
  • Firstpage
    162
  • Lastpage
    167
  • Abstract
    An automatic electron beam (EB) fault tracing system is described which enables us to trace faults automatically from the top level cell to the lowest primitive cell and from the primitive cell to the transistor-level circuit independently of circuit functions. Only VLSI CAD layout data is required
  • Keywords
    VLSI; automatic test equipment; automatic test software; circuit layout CAD; electron beam testing; fault location; integrated circuit testing; scanning electron microscopy; VLSI CAD layout data; automatic testing; electron beam fault tracing; transistor-level circuit; Circuit faults; Circuit testing; Data engineering; Data mining; Design automation; Large scale integration; Pins; Scanning electron microscopy; System testing; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Test Symposium, 1997. (ATS '97) Proceedings., Sixth Asian
  • Conference_Location
    Akita
  • ISSN
    1081-7735
  • Print_ISBN
    0-8186-8209-4
  • Type

    conf

  • DOI
    10.1109/ATS.1997.643953
  • Filename
    643953