DocumentCode
318852
Title
Automatic EB fault tracing system by successive circuit extraction from VLSI CAD layout data
Author
Miura, Katsuyoshi ; Nakata, Kohei ; Nakamae, Koji ; Fujioka, Hiromu
Author_Institution
Fac. of Eng., Osaka Univ., Japan
fYear
1997
fDate
17-19 Nov 1997
Firstpage
162
Lastpage
167
Abstract
An automatic electron beam (EB) fault tracing system is described which enables us to trace faults automatically from the top level cell to the lowest primitive cell and from the primitive cell to the transistor-level circuit independently of circuit functions. Only VLSI CAD layout data is required
Keywords
VLSI; automatic test equipment; automatic test software; circuit layout CAD; electron beam testing; fault location; integrated circuit testing; scanning electron microscopy; VLSI CAD layout data; automatic testing; electron beam fault tracing; transistor-level circuit; Circuit faults; Circuit testing; Data engineering; Data mining; Design automation; Large scale integration; Pins; Scanning electron microscopy; System testing; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Symposium, 1997. (ATS '97) Proceedings., Sixth Asian
Conference_Location
Akita
ISSN
1081-7735
Print_ISBN
0-8186-8209-4
Type
conf
DOI
10.1109/ATS.1997.643953
Filename
643953
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