DocumentCode
3189482
Title
Testing of MEMS-based microsystems
Author
Kerkhoff, Hans G.
Author_Institution
MESA+ Inst. for Nanotechnology, Enschede, Netherlands
fYear
2005
fDate
22-25 May 2005
Firstpage
223
Lastpage
228
Abstract
The introduction of MEMS in microsystems is progressing rapidly. The high-volume testing of these multi-domain systems are often relatively cumbersome in comparison with pure electrical tests, because of non-electrical stimuli and/or response. It requires currently custom-made test set-up. Also the quality of tests is difficult to quantify. Hence, structural tests seem more appropriate, but this requires a lot of research and new approaches.
Keywords
micromechanical devices; semiconductor device testing; MEMS testing; MEMS-based microsystems; electrical tests; high-volume testing; multidomain systems; nonelectrical response; nonelectrical stimuli; structural tests; Costs; Electronics packaging; Fluidics; Integrated optics; Intelligent sensors; Micromachining; Micromechanical devices; Nanotechnology; Optical sensors; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Symposium, 2005. European
Print_ISBN
0-7695-2341-2
Type
conf
DOI
10.1109/ETS.2005.40
Filename
1430035
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