DocumentCode :
3194632
Title :
An active rectifier-phase shifted ZVS-PWM DC-DC converter with HF planar transformer-link for RF plasma power generator
Author :
Mishima, Tomokazu ; Ooue, Yasuyuki ; Fukumoto, Yoshiki ; Nakaoka, Mutsuo
Author_Institution :
Kure Nat. Coll. of Technol., Kure, Japan
fYear :
2009
fDate :
2-5 Nov. 2009
Firstpage :
712
Lastpage :
717
Abstract :
This paper presents the zero voltage switching (ZVS) PWM dual full bridge (DFB) DC-DC converter with secondary-side phase-shifting power control scheme. The soft-switching PWM DC-DC converter newly developed for a DC pre-regulator in a plasma radio frequency (RF) power generator can achieve soft commutation at all the power devices under the wide range of load power. By introducing the phase-shifting control scheme that is based on the secondary-side rectifier of the high-frequency (HF) planar transformer, it can attain the effective reduction of idling power in the primary-side inverter as well as the completely recovery-less diode commutations in the secondary-side rectifier. The experimental operating performance, power loss analysis and actual conversion efficiencies of the DC-DC converter are described to verify the soft-switching circuit, and the feasibility is discussed from the practical point of view.
Keywords :
DC-DC power convertors; PWM power convertors; power control; power transformers; rectifiers; zero voltage switching; HF planar transformer link; PWM dual full bridge DC-DC converter; RF plasma power generator; active rectifier-phase shifted ZVS-PWM DC-DC converter; high-frequency planar transformer; plasma radio frequency power generator; power devices; power loss analysis; secondary-side phase-shifting power control scheme; secondary-side rectifier; zero voltage switching; Bridge circuits; DC-DC power converters; Hafnium; Plasmas; Power generation; Pulse width modulation; Pulse width modulation converters; Radio frequency; Rectifiers; Zero voltage switching; DC-DC converter; HF-link; Plasma power generator; Pulse Width Modulation(PWM); Zero Voltage Switching(ZVS); secondary-side phase shifting(SPS);
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Power Electronics and Drive Systems, 2009. PEDS 2009. International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4244-4166-2
Electronic_ISBN :
978-1-4244-4167-9
Type :
conf
DOI :
10.1109/PEDS.2009.5385771
Filename :
5385771
Link To Document :
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