Fabrication and test of arrays of langasite microbalances

Author

Ansorge, E. ; Brose, A. ; Schmidt, B. ; Sauerwald, J. ; Fritze, H.

Author_Institution

Inst. of Micro- & Sensor Syst. (IMOS), Otto-von-Guericke-Univ., Magdeburg, Germany

fYear

2010

fDate

13-16 Sept. 2010

Firstpage

1

Lastpage

6

Abstract

The design of piezoelectricaly actuated plano-convex shaped resonators has been studied to optimize their Q-factor and signal spectrum at high temperatures. The investigated arrays of thickness-shear-mode (TSM) resonators consist of langasite, a high temperature stable material. As viscoelastic damping and an increasing conductivity decreases the Q-factor at elevated temperatures, design optimizations have to counteract these effects. Two and three dimensional finite element (FE) models have been solved to analyze the resonant behavior and the effects of energy confinement at different temperatures depending on geometry. The separation and suppression of spurious modes, the improvement of the Q-factor and the confinement of the TSM could be shown. The simulated effects of energy confinement could be proofed by impedance measurements.

Keywords

Q-factor; crystal resonators; damping; electrical conductivity; finite element analysis; microbalances; viscoelasticity; La₃Ga₅SiO₁₄; conductivity; high temperature Q-factor; high temperature signal spectrum; langasite microbalance arrays; piezoelectricaly actuated plano-convex shaped resonators; thickness-shear-mode resonators; three dimensional finite element models; two dimensional finite element models; viscoelastic damping; Biomembranes; Finite element methods; Resonant frequency; Temperature; Temperature measurement; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic System-Integration Technology Conference (ESTC), 2010 3rd

Conference_Location

Berlin

Print_ISBN

978-1-4244-8553-6

Electronic_ISBN

978-1-4244-8554-3

Type

conf

DOI

10.1109/ESTC.2010.5642800

Filename

5642800