DocumentCode :
3197157
Title :
Atom Probe Tomography Studies of RF Materials
Author :
Norem, J. ; Bauer, P. ; Sebastian, J. ; Seidman, D.N.
Author_Institution :
ANL, Argonne, IL, 60439 USA, norem@anl.gov
fYear :
2005
fDate :
16-20 May 2005
Firstpage :
612
Lastpage :
614
Abstract :
We are constructing a facility that combines an atom probe field ion microscope with a multi-element in-situ deposition and surface modification capability. This system is dedicated to rf studies and the initial goal will be to understand the properties of evaporative coatings: field emission, bonding, interdiffusion, etc., to suppress breakdown and dark currents in normal cavities. We also hope to use this system to look more generally at interactions of surface structure and high rf fields. We will present preliminary data on structures relevant to normal and superconducting rf systems.
Keywords :
Atomic layer deposition; Bonding; Coatings; Dark current; Electric breakdown; Microscopy; Probes; Radio frequency; Surface structures; Tomography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Particle Accelerator Conference, 2005. PAC 2005. Proceedings of the
Print_ISBN :
0-7803-8859-3
Type :
conf
DOI :
10.1109/PAC.2005.1590506
Filename :
1590506
Link To Document :
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