Title :
Influence of oxygen atmosphere on LiNbO3 thin films prepared by Pechini process
Author :
Stojanovic, B.D. ; Simoes, A.Z. ; Zaghete, M.A. ; Setter, N. ; Varela, J.A.
Author_Institution :
Center for Multidisciplinary Studies, Univ. of Belgrade, Beograd, Serbia
Abstract :
Thin films of lithium niobate were deposited on the Pt/Ti/SiO2 (111) substrates by the polymeric precursor method (Pechini process). Annealing in static air and oxygen atmosphere was performed at 500°C for 3 hours. The films obtained were characterized by X-ray diffraction, scanning electron microscopy and transmission electron microscopy. The dielectric constant, dissipation factor and resistance were measured in frequency region from 10 Hz to 10 MHz. Electrical characterizations of the films pointed to ferroelectricity via hysteresis loop. The influence of oxygen atmosphere on crystallization and properties of LiNbO3 thin films is discussed.
Keywords :
X-ray diffraction; annealing; crystallisation; dielectric hysteresis; dielectric polarisation; ferroelectric materials; ferroelectric thin films; liquid phase deposited coatings; lithium compounds; permittivity; scanning electron microscopy; stoichiometry; transmission electron microscopy; 10 Hz to 10 MHz; 3 h; 500 degC; LiNbO3; LiNbO3 thin films; Pechini process; X-ray diffraction; annealing; crystallization; dielectric constant; dissipation factor; hysteresis loop; oxygen atmosphere; polymeric precursor method; resistance; scanning electron microscopy; transmission electron microscopy; Annealing; Atmosphere; Dielectric substrates; Ferroelectric films; Lithium niobate; Polymer films; Scanning electron microscopy; Sputtering; Transmission electron microscopy; X-ray diffraction;
Conference_Titel :
Microelectronics, 2004. 24th International Conference on
Print_ISBN :
0-7803-8166-1
DOI :
10.1109/ICMEL.2004.1314875
