• DocumentCode
    3203403
  • Title

    Surface metastable layer in amorphous silicon and its influence on material photoconductivity and electronic stability

  • Author

    Alyoshkin, R.V. ; Karabanov, S.M.

  • Author_Institution
    Gelion Ltd., Ryazan, Russia
  • fYear
    1996
  • fDate
    13-17 May 1996
  • Firstpage
    1161
  • Lastpage
    1164
  • Abstract
    Light-induced reversible changes in the a-Si:H surface microstructure have been detected with a new method based on the joint analysis of spectral ellipsometric and photometric measurements. These changes consist in the growth of a thin surface overlayer with light soaking correlated with a planar photoconductivity degradation. Some (small) systematic increase in the photoconductivity (but not in the dark conductivity) of as-deposited and light-soaked samples after the chemical etching of the surface with alkaline has also been found. However, numerical simulation indicates that the contribution of surface defects to planar conductivity reduction has to be much less compared to the bulk ones, and their effect in devices is expected to be stronger. In addition, we show that a thin layer with high trap concentration has to occur near the top n/i-interface in n-i-n-structures. The origin of the layer may be related to a hydrogen rearrangement (or reconfiguration)
  • Keywords
    electron traps; elemental semiconductors; ellipsometry; etching; hole traps; hydrogen; photoconductivity; semiconductor junctions; silicon; surface structure; Si:H; a-Si:H; chemical etching; electronic stability; light soaking; n-i-n-structures; n/i-interface; photoconductivity; photometric measurements; spectral ellipsometric measurements; surface defects; surface metastable layer; surface microstructure; trap concentration; Amorphous silicon; Chemicals; Conductivity; Degradation; Etching; Metastasis; Microstructure; Photoconductivity; Photometry; Spectral analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference, 1996., Conference Record of the Twenty Fifth IEEE
  • Conference_Location
    Washington, DC
  • ISSN
    0160-8371
  • Print_ISBN
    0-7803-3166-4
  • Type

    conf

  • DOI
    10.1109/PVSC.1996.564338
  • Filename
    564338