DocumentCode
3203403
Title
Surface metastable layer in amorphous silicon and its influence on material photoconductivity and electronic stability
Author
Alyoshkin, R.V. ; Karabanov, S.M.
Author_Institution
Gelion Ltd., Ryazan, Russia
fYear
1996
fDate
13-17 May 1996
Firstpage
1161
Lastpage
1164
Abstract
Light-induced reversible changes in the a-Si:H surface microstructure have been detected with a new method based on the joint analysis of spectral ellipsometric and photometric measurements. These changes consist in the growth of a thin surface overlayer with light soaking correlated with a planar photoconductivity degradation. Some (small) systematic increase in the photoconductivity (but not in the dark conductivity) of as-deposited and light-soaked samples after the chemical etching of the surface with alkaline has also been found. However, numerical simulation indicates that the contribution of surface defects to planar conductivity reduction has to be much less compared to the bulk ones, and their effect in devices is expected to be stronger. In addition, we show that a thin layer with high trap concentration has to occur near the top n/i-interface in n-i-n-structures. The origin of the layer may be related to a hydrogen rearrangement (or reconfiguration)
Keywords
electron traps; elemental semiconductors; ellipsometry; etching; hole traps; hydrogen; photoconductivity; semiconductor junctions; silicon; surface structure; Si:H; a-Si:H; chemical etching; electronic stability; light soaking; n-i-n-structures; n/i-interface; photoconductivity; photometric measurements; spectral ellipsometric measurements; surface defects; surface metastable layer; surface microstructure; trap concentration; Amorphous silicon; Chemicals; Conductivity; Degradation; Etching; Metastasis; Microstructure; Photoconductivity; Photometry; Spectral analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference, 1996., Conference Record of the Twenty Fifth IEEE
Conference_Location
Washington, DC
ISSN
0160-8371
Print_ISBN
0-7803-3166-4
Type
conf
DOI
10.1109/PVSC.1996.564338
Filename
564338
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