Title :
PMMA as a base material for SU8 mold to fabricate PDMS relief
Author :
Hamzah, Irni Hamiza ; Manaf, Asrulnizam Abd ; Sidek, Othman
Author_Institution :
Collaborative microElectronic Design Excellence Centre (CEDEC), Universiti Sains Malaysia, Engineering Campus, 14300, Penang, Malaysia
Abstract :
A novel fabrication technique using polymethylmethacrylate (PMMA) as a base material for SU8-10 film coating is to be discussed in this paper. The SU8-10 coated onto PMMA is used as a mold to fabricate PDMS relief. The SU8-10 mold has been tested for a square structure and various types of line resolutions. Propylene Glycol Methyl Ether Acetate (PGMEA) developing towards SU8-10 coated on PMMA for 2 hours is suitable for a 5mm × 5mm square structure whereas PGMEA developing for 30 minutes is found to be suitable to produce the smallest resolution of 2mm. The results have proven that PMMA is a promising material to be used as SU8-10 mold despite silicon or glass, two materials which have been commonly used for SU8-10 mold. PMMA in its natural structure is flexible, making it easy to drill and cut. Other advantages of PMMA lie in the facts that it is cheap, transparent and biocompatible.
Keywords :
Coatings; Fabrication; Films; Glass; Resists; Silicon; PDMS; PGMEA; PMMA; SU8-10; base material;
Conference_Titel :
Science and Social Research (CSSR), 2010 International Conference on
Conference_Location :
Kuala Lumpur, Malaysia
Print_ISBN :
978-1-4244-8987-9
DOI :
10.1109/CSSR.2010.5773723