Efficacy of fluorine doping at various stages on noise reduction

Reduction of flicker noise through introduction of fluorine has become a well-known phenomenon. In this paper, we show the effects of fluorine introduced in a number of different ways and its effect on noise characteristics. We find that the introduction method and the location within the flow have a small impact on the effectiveness of the fluorine on noise improvement. This knowledge allows flexible introduction of noise reduction while minimizing the impact on the process flow