• DocumentCode
    3210252
  • Title

    Low temperature synthesis of two-dimensional carbon nanosheets as a field electron emission material

  • Author

    Zhu, Mingyao ; Outlaw, R.A. ; Miraldo, Peter ; Kun, Hou ; Manos, Dennis M.

  • Author_Institution
    Coll. of William & Mary, Williamsburg
  • fYear
    2007
  • fDate
    8-12 July 2007
  • Firstpage
    104
  • Lastpage
    105
  • Abstract
    In this abstract we report carbon nanosheet synthesis at substrate temperatures lowered by 100-150 degC when utilizing C2H2, rather than CH4, as a precursor. Typical C2H2 carbon nano-sheets were successfully deposited on silicon substrates at 550-600 degC substrate temperatures, with 80-100% C2H2 in H2 concentrations at a fixed 5 seem total gas flow rate, 30-40 mTorr total gas pressures, and 1000 W input RF power.
  • Keywords
    carbon compounds; carbon nanotubes; electron field emission; low-temperature techniques; silicon; 2D carbon nanosheets; Si; field electron emission material; gas flow rate; low temperature synthesis; temperature 100 C to 150 C; temperature 550 C to 600 C; Atomic layer deposition; Carbon dioxide; Diffraction; Electron emission; Hydrogen; Organic materials; Plasma properties; Plasma temperature; Radio frequency; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International
  • Conference_Location
    Chicago, IL
  • Print_ISBN
    978-1-4244-1133-7
  • Electronic_ISBN
    978-1-4244-1134-4
  • Type

    conf

  • DOI
    10.1109/IVNC.2007.4480952
  • Filename
    4480952
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3210252