DocumentCode
3210316
Title
The effects of internal stresses on the precision of moveable structures for optical MEMS
Author
Greek, S. ; Hjort, K.
Author_Institution
Dept. of Mater. Sci., Uppsala Univ., Sweden
fYear
1998
fDate
20-24 July 1998
Abstract
It is vital for the performance of optical MEMS that the bimorph systems are investigated and that the effects of the internal stresses are modelled in the design work. The present work contains a method which can be applied to many material systems in the design work of micromachined structures.
Keywords
internal stresses; micro-optics; micromechanical devices; optical design techniques; bimorph systems; design work; internal stresses; material systems; micromachined structures; moveable structures; optical MEMS; precision; Compressive stress; Fabry-Perot; Indium phosphide; Internal stresses; Micromechanical devices; Microstructure; Mirrors; Optical films; Optical filters; Tensile stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location
Monterey, CA, USA
Print_ISBN
0-7803-4953-9
Type
conf
DOI
10.1109/LEOSST.1998.689707
Filename
689707
Link To Document