Title :
Correlation between field emission current fluctuation and physisorption of gases in graphite-nanoneedle cold cathode
Author :
Matsumoto, T. ; Neo, Y. ; Mimura, H. ; Tomita, M.
Author_Institution :
Stanley Electr. Corp., Tsukuba
Abstract :
In this paper, we show the emission current fluctuation of graphite nanoneedle cold cathode (GRANN) as a function of cathode temperature in the presence of various gases such as H2, CO, and He molecules. Field emission current measurements were performed in an atmosphere of the above gas (10-5-10-8 torr) over a temperature range of 300 to 1800 K. A high sensitivity quadrupole mass spectrometer was employed to monitor the gas pressure of physisorbed species.
Keywords :
adsorption; carbon compounds; cathodes; electron field emission; graphite; helium; hydrogen; mass spectroscopic chemical analysis; nanoelectronics; vacuum microelectronics; C; CO; H2; He; cathode temperature; field emission current fluctuation; field emission current measurements; gas pressure monitoring; gases physisorption; graphite-nanoneedle cold cathode; high sensitivity quadrupole mass spectrometer; pressure 0.00010 torr to 0.00000010 torr; temperature 300 K to 1800 K; Atmosphere; Cathodes; Current measurement; Fluctuations; Gases; Helium; Mass spectroscopy; Performance evaluation; Temperature distribution; Temperature sensors;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-1133-7
Electronic_ISBN :
978-1-4244-1134-4
DOI :
10.1109/IVNC.2007.4480959
